Principle of Ellipsometer
An ellipsometer is an optical measuring device used to detect film thickness, optical constants, and microstructural properties of materials. The principle is as follows: when elliptically polarized light with a known polarization state is incident on the surface of a sample, the polarization state of the reflected light is measured, and the material properties are calculated or fitted based on this information.
Instrument Models and Parameters
- Instrument Model: ME-L Mueller Matrix Spectroscopic Ellipsometer
- Technical Parameters:
- Analysis Spectrum: 210–1000 nm
- Repeatability: 0.005 nm
Sample Submission Requirements and Precautions
- Sample size: Length 3–10 cm, width 3–10 cm, thickness < 1 mm
Testing Examples
Reference Standards
- SEMI M91-0319: Standard Test Method for Measurement of Silicon Oxide Thickness by Ellipsometry
- ASTM F2864-18: Standard Test Method for Measurement of Thin Film Thickness and Optical Constants by Variable Angle Spectroscopic Ellipsometry
- ASTM D4146-15: Standard Practice for Ellipsometric Measurements of Optical Properties of Solid Materials
- ISO 15031-7:2000: Road Vehicles — Electrical and Electronic Equipment for Vehicles — Part 7: Test Methods for Optical Properties
